The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2016
Filed:
Nov. 14, 2013
Applicants:
Yue Zhang, Singapore, SG;
Chong Hao Chen, Singapore, SG;
Zheng Yu Lin, Singapore, SG;
Inventors:
Assignee:
ASM TECHNOLOGY SINGAPORE PTE LTD, Singapore, SG;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 15/02 (2006.01); B25J 15/00 (2006.01); H01L 23/00 (2006.01); E02D 3/054 (2006.01);
U.S. Cl.
CPC ...
B25J 15/0028 (2013.01); B25J 15/0033 (2013.01); B25J 15/0042 (2013.01); H01L 24/74 (2013.01); H01L 24/78 (2013.01); H01L 24/85 (2013.01); E02D 3/054 (2013.01); H01L 2224/45099 (2013.01); H01L 2224/78 (2013.01); H01L 2924/00014 (2013.01); Y10T 29/49998 (2015.01); Y10T 29/5323 (2015.01); Y10T 29/53222 (2015.01); Y10T 29/53226 (2015.01); Y10T 29/53257 (2015.01); Y10T 29/53283 (2015.01);
Abstract
A wire clamp includes a clamp body; a pair of arms coupled to the clamp body; and a piezoelectric actuator having a longitudinal axis extending between a first end and a second end, the actuator being coupled to the pair of arms at the first end and to the clamp body at the second end. The second end of the actuator is coupled to the clamp body by a preload mechanism for applying a preload force along the longitudinal axis, and the preload mechanism comprises at least one wedge having an inclined surface which is slidable over a mating inclined surface.