The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2016
Filed:
Mar. 15, 2013
Hitachi High-technologies Corporation, Tokyo, JP;
Yayoi Konishi, Tokyo, JP;
Mitsugu Sato, Tokyo, JP;
Masaki Takano, Tokyo, JP;
Shotaro Tamayama, Tokyo, JP;
Masako Nishimura, Tokyo, JP;
Shunya Watanabe, Tokyo, JP;
Mami Konomi, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation screen display observation target setting buttons for changing an observation condition for a specimen including a combination of parameter setting values of a charged particle beam apparatus. The processing unit has the operation screen display a radar chart including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons. The radar chart indicates at least items of high resolution, emphasis on surface structure and emphasis on material difference.