The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 13, 2016

Filed:

Nov. 05, 2014
Applicant:

Rigaku Corporation, Akishima-shi, JP;

Inventors:

Kouji Kakefuda, Akishima, JP;

Ichiro Tobita, Inagi, JP;

Assignee:

RIGAKU CORPORATION, Akishima-Shi, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/20 (2006.01); G01N 23/207 (2006.01);
U.S. Cl.
CPC ...
G01N 23/207 (2013.01); G01N 23/20016 (2013.01); G01N 2223/303 (2013.01);
Abstract

An optical axis adjustment method for an X-ray analyzer. In a 2θ-adjustment step, a 0° position of the rotation of a receiving-side arm and a 0° position of the angle of diffraction 2θ are aligned. In a Zs-axis adjustment step, the position of an incident-side slit along a direction orthogonal to the centerline of the X-rays incident upon a sample from an X-ray source is adjusted. In a θ-adjustment step, the centerline of X-rays incident upon the sample from the X-ray source and the surface of the sample are adjusted so as to be parallel. In the 2θ-adjustment step, the Zs-axis adjustment step, and the θ-adjustment step, the capability for X-ray intensity positional resolution upon a straight line possessed by a one-dimensional X-ray detector is used to perform 2θ-adjustment, Zs-axis adjustment, and θ-adjustment.


Find Patent Forward Citations

Loading…