The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2016
Filed:
Apr. 30, 2015
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Takeshi Kumagai, Iwate, JP;
Muneyuki Otani, Iwate, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/34 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); C23C 16/06 (2006.01);
U.S. Cl.
CPC ...
C23C 16/34 (2013.01); C23C 16/06 (2013.01); C23C 16/405 (2013.01); C23C 16/4584 (2013.01); C23C 16/45525 (2013.01); C23C 16/45551 (2013.01); C23C 16/45574 (2013.01);
Abstract
A method of depositing a continuous TiN film on a substrate is provided. In the method, a continuous TiOfilm is deposited on a substrate, and then a continuous TiN film is deposited on the continuous TiOfilm. The TiN film is thicker than the TiOfilm.