The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2016
Filed:
Apr. 16, 2015
Applicants:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Namlab Ggmbh, Dresden, DE;
Inventors:
Kyu-Ho Cho, Seoul, KR;
Youn-Soo Kim, Yongin-si, KR;
Han-Jin Lim, Seoul, KR;
Steve Knebel, Dresden, DE;
Uwe Schroeder, Dresden, DE;
Assignees:
Samsung Electronics Co., Ltd., , KR;
NaMLab gGmbH, , DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/02 (2006.01); H01L 27/108 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02192 (2013.01); H01L 27/10814 (2013.01); H01L 27/10817 (2013.01); H01L 27/10855 (2013.01); H01L 27/10885 (2013.01); H01L 27/10894 (2013.01); H01L 28/40 (2013.01);
Abstract
A capacitor can include a crystallized metal oxide dielectric layer having a first dielectric constant and an amorphous metal oxide dielectric layer, on the crystallized metal oxide dielectric layer, where the amorphous metal oxide dielectric layer has a second dielectric constant that is less than the first dielectric constant and is greater than a dielectric constant of aluminum oxide.