The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 06, 2016

Filed:

Feb. 05, 2014
Applicants:

Younsoo Kim, Yongin-si, KR;

Sangyeol Kang, Suwon-si, KR;

Hiroki Sato, Tokyo, JP;

Tsubasa Shiratori, Tokyo, JP;

Naoki Yamada, Tokyo, JP;

Chayoung Yoo, Suwon-si, KR;

Younjoung Cho, Hwaseong-si, KR;

Chin Moo Cho, Seoul, KR;

Jaehyoung Choi, Hwaseong-si, KR;

Inventors:

Younsoo Kim, Yongin-si, KR;

Sangyeol Kang, Suwon-si, KR;

Hiroki Sato, Tokyo, JP;

Tsubasa Shiratori, Tokyo, JP;

Naoki Yamada, Tokyo, JP;

Chayoung Yoo, Suwon-si, KR;

Younjoung Cho, Hwaseong-si, KR;

Chin Moo Cho, Seoul, KR;

Jaehyoung Choi, Hwaseong-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C23C 16/40 (2006.01); C23C 16/34 (2006.01); C23C 16/455 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0217 (2013.01); C23C 16/34 (2013.01); C23C 16/401 (2013.01); C23C 16/45531 (2013.01); C23C 16/45553 (2013.01); H01L 21/0228 (2013.01); H01L 21/02164 (2013.01); H01L 21/02189 (2013.01); H01L 21/02211 (2013.01); H01L 28/40 (2013.01);
Abstract

A trialkylsilane-based silicon precursor compound may be expressed by Si(R)X, i=1-3, where each of 'R', 'R', and “R” is a hydrogen or an alkyl having 1-5 carbon(s), all of “R”, “R”, and “R” are not hydrogen, “X” is one of hydrogen, a hydroxyl group, an amide group, an alkoxide group, a halide group, or Si(R*), and “R*” is a hydrogen or an alkyl group having 1˜5 carbon(s).


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