The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2016
Filed:
Mar. 14, 2011
Applicants:
Peter Andrews, Beaverton, OR (US);
David Hess, Beaverton, OR (US);
Inventors:
Peter Andrews, Beaverton, OR (US);
David Hess, Beaverton, OR (US);
Assignee:
CASCADE MICROTECH, INC., Beaverton, OR (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/28 (2006.01); G01B 9/04 (2006.01); G01B 21/16 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2891 (2013.01);
Abstract
Focusing optical systems and methods for testing semiconductors are disclosed herein. The methods include receiving an image of a probe through a single optical path of a microscope, substantially focusing the microscope on the probe, and determining a vertical height adjustment between the probe and a device under test based upon the focusing.