The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 06, 2016

Filed:

Jul. 29, 2015
Applicant:

Infineon Technologies Ag, Neubiberg, DE;

Inventors:

Ming Xue, Singapore, SG;

Chow York Lee, Singapore, SG;

Assignee:

Infineon Technologies AG, Neubiberg, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/00 (2006.01); G01R 1/04 (2006.01); G01R 31/04 (2006.01); G01R 1/07 (2006.01); G01R 31/28 (2006.01); G01R 31/312 (2006.01);
U.S. Cl.
CPC ...
G01R 1/0466 (2013.01); G01R 1/07 (2013.01); G01R 31/041 (2013.01); G01R 31/2889 (2013.01); G01R 31/2896 (2013.01); G01R 31/312 (2013.01);
Abstract

A test apparatus includes a multi-channel probe plate having an electrically insulating body with opposing first and second main surfaces, and a plurality of spaced apart electrically conductive coupling regions embedded in or attached to the body at the first main surface. Each of the electrically conductive coupling regions is configured to cover a different zone of a semiconductor package when the semiconductor package is positioned in close proximity to the first main surface of the plate. The test apparatus further includes circuitry electrically connected to each of the coupling regions of the probe plate via a different channel. The circuitry is operable to measure a parameter indicative of the degree of capacitive coupling between each electrically conductive coupling region of the probe plate and the zone of the semiconductor package covered by the corresponding electrically conductive coupling region.


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