The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2016
Filed:
May. 05, 2014
Applicant:
Macronix International Co., Ltd., Hsinchu, TW;
Inventors:
Yu-Hua Yeh, Hsinchu, TW;
Liang-Yu Hu, Hsinchu County, TW;
Tang-Tsai Chang, Hsinchu County, TW;
Ming-Tsan Lai, Zhubei, TW;
Assignee:
MACRONIX INTERNATIONAL CO., LTD., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/04 (2012.01); B24B 37/34 (2012.01); B24B 55/00 (2006.01); B24B 37/10 (2012.01);
U.S. Cl.
CPC ...
B24B 37/04 (2013.01); B24B 37/042 (2013.01); B24B 37/105 (2013.01); B24B 37/34 (2013.01); B24B 55/00 (2013.01);
Abstract
A planarization device and a planarization method using the same are provided. The planarization device comprises a platen, a grinding pad, an operation arm, a chuck and a shielding pad. The grinding pad is disposed on the platen. The operation arm has a lower surface. The chuck rotatably is disposed on the operation arm. The shielding pad is detachably disposed on the lower surface of the operation arm.