The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2016
Filed:
Mar. 19, 2013
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Ronald Van Der Wilk, Knegsel, NL;
Roger Wilhelmus Antonius Henricus Schmitz, Helmond, NL;
Arnoud Willem Notenboom, Rosmalen, NL;
Manon Elise Will, Eindhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/52 (2006.01); G03F 7/20 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70708 (2013.01); G03F 7/70875 (2013.01); H01L 21/6831 (2013.01);
Abstract
An electrostatic clamp () configured to hold an object, the electrostatic clamp comprising an electrode (), a resistive portion () formed from a resistive material located on the electrode, and a dielectric portion () formed from a dielectric material located on the resistive portion.