The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 30, 2016

Filed:

Jun. 04, 2015
Applicant:

Robert Bosch Gmbh, Stuttgart, DE;

Inventors:

Friedjof Heuck, Stuttgart, DE;

Lars Tebje, Reutlingen, DE;

Heiko Stahl, Reutlingen, DE;

Jullian Gonska, Reutlingen, DE;

Reinhard Neul, Stuttgart, DE;

Assignee:

ROBERT BOSCH GMBH, Stuttgart, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); B81B 7/02 (2006.01); H01L 23/02 (2006.01); H01L 23/10 (2006.01); H01L 21/50 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0038 (2013.01); B81B 7/02 (2013.01); B81C 1/00285 (2013.01); B81B 2203/0315 (2013.01); B81C 2203/0145 (2013.01); H01L 21/50 (2013.01); H01L 23/02 (2013.01); H01L 23/10 (2013.01);
Abstract

For the targeted influencing of the internal pressure within a cavity between two elements of a component, a getter material or an outgassing material is situated in an additional cavity between the two elements. After the two elements are bonded to one another, the additional cavity is still to be joined via a connecting opening to the cavity. The getter material or the outgassing material is then activated so that gasses are bound in the additional cavity and in the connected cavity, or an outgassing takes place. Only when the sought internal pressure has established itself in the connected cavity is the connecting opening to the additional cavity closed. In this way, the getter material or the outgassing material is only used for establishing a defined internal pressure, but no longer has any influence on the internal pressure within the cavity during ongoing operation of the component.


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