Scanning probe microscope and measuring method using same

Abstract

Provided is a scanning probe microscope that takes measurements at high spatial resolution on physical information such as array structure of water molecules at a specimen-culture fluid interface in a culture fluid as well as irregularities of the surface of a specimen and composition distribution and array structure of molecules, proteins, etc. even in the atmosphere, an ambient air, vacuum, among others. The scanning probe microscope includes: a probing needle (); a specimen holder () in which a specimen () is mounted; an oscillator () that produces a periodic oscillation to change the probing needle position; a pulse oscillation type laser light source () that emits light toward a spot, which is put under measurement by the probing needle, on the specimen; a detector () that measures intensity of output light which is output from the specimen by energy spectroscopy; and a control device (). The control device decreases amplitude of the periodic oscillation to change the probing needle position by the oscillator, shortens a relative distance between the probing needle and the specimen, and synchronizes shortening of the distance between the probing needle and the specimen and emission of pulse oscillation laser light, thus optimizing efficiency of tip-enhanced detection.