The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 23, 2016

Filed:

Feb. 16, 2012
Applicants:

Takuya Sugawara, Yokohama, JP;

Hikaru Aoshima, Yokohama, JP;

Yousong Jiang, Yokohama, JP;

Ichiro Shiono, Yokohama, JP;

Inventors:

Takuya Sugawara, Yokohama, JP;

Hikaru Aoshima, Yokohama, JP;

Yousong Jiang, Yokohama, JP;

Ichiro Shiono, Yokohama, JP;

Assignee:

SHINCRON CO., LTD., Kanagawa, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C03C 17/34 (2006.01); C23C 14/06 (2006.01); C23C 14/10 (2006.01); C23C 14/00 (2006.01); C23C 28/00 (2006.01); C23C 28/04 (2006.01);
U.S. Cl.
CPC ...
C23C 14/0635 (2013.01); C03C 17/3441 (2013.01); C23C 14/0078 (2013.01); C23C 14/10 (2013.01); C23C 28/04 (2013.01); C23C 28/42 (2013.01); C03C 2217/78 (2013.01); Y10T 428/24975 (2015.01);
Abstract

A translucent hard thin film having high transmissivity and film strength is provided. The translucent hard thin film can be composed of a laminated film formed on a substrate surface, wherein the laminated film has a superlattice structure obtained by stacking a plurality of SiOlayer and SiC layers alternately and the entire film thickness is 3000 nm or more. A film thickness per layer is 5 to 30 nm in a SiC layer and 30% to 60% of that of the SiOlayer in a SiC layer.


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