The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2016
Filed:
Dec. 02, 2014
Metal and dielectric compatible sacrificial anti-reflective coating cleaning and removal composition
Entegris, Inc., Danbury, CT (US);
Melissa K. Rath, Redondo Beach, CA (US);
David D. Bernhard, Kooskia, ID (US);
Thomas H. Baum, New Fairfield, CT (US);
David W. Minsek, New Milford, CT (US);
ADVANCED TECHNOLOGY MATERIALS, INC., Danbury, CT (US);
Abstract
A liquid removal composition and process for removing sacrificial anti-reflective coating (SARC) material from a substrate having same thereon. The liquid removal composition includes at least one fluoride-containing compound, at least one organic solvent, optionally water, and optionally at least one chelating agent. The composition achieves at least partial removal of SARC material in the manufacture of integrated circuitry with minimal etching of metal species on the substrate, such as aluminum, copper and cobalt alloys, and without damage to low-k dielectric materials employed in the semiconductor architecture.