The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2016
Filed:
May. 18, 2015
Applicant:
United Microelectronics Corp., Hsin-Chu, TW;
Inventors:
Yu-Ying Lin, Tainan, TW;
Kuang-Hsiu Chen, Tainan, TW;
Ted Ming-Lang Guo, Tainan, TW;
Yu-Ren Wang, Tainan, TW;
Assignee:
UNITED MICROELECTRONICS CORP., Hsin-Chu, TW;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 29/423 (2006.01); H01L 21/3065 (2006.01); H01L 21/225 (2006.01); H01L 21/283 (2006.01);
U.S. Cl.
CPC ...
H01L 29/42356 (2013.01); H01L 21/2253 (2013.01); H01L 21/283 (2013.01); H01L 21/3065 (2013.01); H01L 29/0642 (2013.01); H01L 29/0692 (2013.01);
Abstract
The present invention provides a semiconductor structure, which includes a substrate, at least two gate structures disposed on the substrate, a first recess, disposed in the substrate between two gate structures, the first recess having a U-shaped cross section profile, and a second recess, disposed on the first recess, the second recess having a polygonal shaped cross section profile, and has at least two tips on two sides of the second recess, the first recess and the second recess forming an epitaxial recess.