The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2016
Filed:
Nov. 29, 2012
Applicant:
Tosoh Corporation, Yamaguchi, JP;
Inventors:
Hideto Kuramochi, Kanagawa, JP;
Kimiaki Tamano, Kanagawa, JP;
Hitoshi Iigusa, Kanagawa, JP;
Ryo Akiike, Kanagawa, JP;
Tetsuo Shibutami, Kanagawa, JP;
Assignee:
TOSOH CORPORATION, Yamaguchi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01B 1/08 (2006.01); C04B 35/01 (2006.01); C04B 35/626 (2006.01); C23C 14/08 (2006.01); C23C 14/34 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
H01B 1/08 (2013.01); C04B 35/01 (2013.01); C04B 35/6262 (2013.01); C23C 14/083 (2013.01); C23C 14/086 (2013.01); C23C 14/34 (2013.01); C23C 14/3414 (2013.01); H01J 37/3429 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3244 (2013.01); C04B 2235/3286 (2013.01); C04B 2235/549 (2013.01); C04B 2235/5445 (2013.01); C04B 2235/6562 (2013.01); C04B 2235/6565 (2013.01); C04B 2235/6567 (2013.01); C04B 2235/6585 (2013.01); C04B 2235/6586 (2013.01); C04B 2235/77 (2013.01); C04B 2235/786 (2013.01);
Abstract
The present invention provides a complex oxide sintered bodywherein Zr/(In+Zr+Y) is 0.05 to 4.5 at % and Y/(In+Zr+Y) is 0.005 to 0.5 at % in an atomic ratio when indium, zirconium, and yttrium are designated by In, Zr, and Y, respectively. Moreover, the present invention provides a sputtering target including the complex oxide sintered bodyand a transparent conductive oxide film obtained by sputtering the sputtering target.