The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2016
Filed:
Jul. 05, 2010
Applicants:
Shimon Koren, Haifa, IL;
OR Shur, Nesher, IL;
Inventors:
Shimon Koren, Haifa, IL;
Or Shur, Nesher, IL;
Assignee:
CAMTEK LTD., Migdal Haemek, IL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2006.01); G01N 21/95 (2006.01);
U.S. Cl.
CPC ...
G06T 7/001 (2013.01); G01N 21/9501 (2013.01); G06T 7/0004 (2013.01); G06T 7/0006 (2013.01); G06T 2207/30148 (2013.01);
Abstract
A system, a non-transitory computer program product and a method for selecting an inspection recipe, the method includes: (i) obtaining an image of a structural element of the semiconductor device; (ii) calculating multiple types of distances between the image of the structural element and each of a plurality of reference images obtained by applying a plurality of inspection recipes; and (iii) automatically selecting at least one selected inspection recipe out of the plurality of inspection recipes based on values of the multiple types of distances.