The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2016
Filed:
Oct. 11, 2007
Vladimir A. Dmitriev, Gaithersburg, MD (US);
Oleg V. Kovalenkov, Montgomery Village, MD (US);
Vladimir Ivantsov, Beltsville, MD (US);
Lisa Shapovalov, Gaithersburg, MD (US);
Alexander L. Syrkin, Montgomery Village, MD (US);
Anna Volkova, Gaithersburg, MD (US);
Vladimir Sizov, Gaithersburg, MD (US);
Alexander Usikov, Gaithersburg, MD (US);
Vitali A. Soukhoveev, Gaithersburg, MD (US);
Vladimir A. Dmitriev, Gaithersburg, MD (US);
Oleg V. Kovalenkov, Montgomery Village, MD (US);
Vladimir Ivantsov, Beltsville, MD (US);
Lisa Shapovalov, Gaithersburg, MD (US);
Alexander L. Syrkin, Montgomery Village, MD (US);
Anna Volkova, Gaithersburg, MD (US);
Vladimir Sizov, Gaithersburg, MD (US);
Alexander Usikov, Gaithersburg, MD (US);
Vitali A. Soukhoveev, Gaithersburg, MD (US);
Ostendo Technologies, Inc., Carlsbad, CA (US);
Abstract
Apparatus and methods for controlling gas flows in a HVPE reactor. Gas flows may be controlled by a gas focusing element. Gas injection and gas collection tubes are positioned within an outer tube and are separated from each other to define a space there between. A gas, such as HCl gas, flows over the outer surfaces of the injection and collection tubes to contain gases within the space as they flow from the injection tube to the collection tube and over a seed upon which group III nitride materials are grown. Gas flows may also be controlled by a multi-tube structure that separates gases until they reach a grown zone. A multi-tube structure may include four tubes, which separate flows of a halide reactive gas, a reaction product that flows with a carrier gas, and ammonia.