The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 09, 2016

Filed:

Feb. 05, 2014
Applicant:

Mitsubishi Materials Corporation, Tokyo, JP;

Inventors:

Jun Fujii, Naka-gun, JP;

Hideaki Sakurai, Naka-gun, JP;

Nobuyuki Soyama, Naka-gun, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/01 (2006.01); H01B 1/08 (2006.01); H01B 13/00 (2006.01); C23C 18/12 (2006.01); C04B 35/624 (2006.01); C04B 35/626 (2006.01); C04B 35/632 (2006.01);
U.S. Cl.
CPC ...
H01B 1/08 (2013.01); C04B 35/01 (2013.01); C04B 35/624 (2013.01); C04B 35/62625 (2013.01); C04B 35/632 (2013.01); C23C 18/1216 (2013.01); C23C 18/1225 (2013.01); C23C 18/1279 (2013.01); H01B 13/00 (2013.01); C04B 2235/3227 (2013.01); C04B 2235/3279 (2013.01); C04B 2235/441 (2013.01); C04B 2235/443 (2013.01); C04B 2235/449 (2013.01); C04B 2235/6585 (2013.01);
Abstract

A LaNiOthin film having extremely few voids is uniformly formed. Provided is a LaNiOthin film-forming composition for forming a LaNiOthin film. It includes: a LaNiOprecursor; a first organic solvent; a stabilizer; and a second organic solvent. The first organic solvent includes carboxylic acids, alcohols, esters, ketones, ethers, cycloalkanes, aromatic compounds, or tetrahydrofuran. The stabilizer includes β-diketones, β-ketones, β-keto esters, oxyacids, diols, triols, carboxylic acids, alkanolamines, or polyvalent amines. The second organic solvent has a boiling point of 150° C. to 300° C. and a surface tension of 20 to 50 dyn/cm. The LaNiOprecursor content is 1 to 20 mass % with respect to 100 mass % of the composition. The stabilizer content is 0 to 10 mol with respect to 1 mol of a total amount of the LaNiOprecursors. The second organic solvent content is 5 to 20 mass % with respect to the composition.


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