The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2016
Filed:
Feb. 28, 2014
Applicant:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Inventors:
Hideo Shinomiya, Mie, JP;
Jun Hirota, Kanagawa, JP;
Kazunori Harada, Kanagawa, JP;
Moto Yabuki, Mie, JP;
Assignee:
KABUSHIKI KAISHA TOSHIBA, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01Q 10/00 (2010.01); G01Q 10/06 (2010.01); G01Q 60/30 (2010.01);
U.S. Cl.
CPC ...
G01Q 10/06 (2013.01); G01Q 60/30 (2013.01);
Abstract
A scanning probe microscope includes a stage on which a sample is mounted, a probe configured to measure a characteristic of the sample, and a controller configured to move the probe and the stage relative to each other along a scanning trajectory during measurement of the characteristic of the sample. The scanning trajectory includes a plurality of linear segments, wherein each pair of adjacent linear segments form an angle that is 90 degrees or less.