The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2016
Filed:
Jun. 26, 2015
Tokyo Electron Limited, Minato-ku, Tokyo, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
An annealing system and method of operating is described. The annealing system includes a vertical furnace having an inner cylindrical insulating tube and at least one heating element surrounding an outer surface thereof, wherein the inner cylindrical insulating tube defines a processing space into which a plurality of workpieces may be vertically translated and subjected to thermal and/or magnetic processing. The annealing system further includes a workpiece boat for carrying at least one hundred workpieces, a boat loader arranged beneath the vertical furnace, and configured to vertically translate the workpiece boat and position the workpieces within the processing space, and a magnet system arranged outside the vertical furnace and configured to generate a magnetic field within the processing space.