The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2016
Filed:
Dec. 23, 2013
Applicant:
Sputtering Components, Inc., Owatonna, MN (US);
Inventors:
Daniel Theodore Crowley, Owatonna, MN (US);
Patrick Lawrence Morse, Tuscon, AZ (US);
William A. Meredith, Jr., Faribault, MN (US);
John Robert German, Owatonna, MN (US);
Michelle Lynn Neal, Albert Lea, MN (US);
Assignee:
Sputtering Components, Inc., Owatonna, MN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 7/24 (2006.01); H05B 31/26 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3405 (2013.01); H01J 37/345 (2013.01); H01J 37/3417 (2013.01); H01J 37/3438 (2013.01); H01J 37/3444 (2013.01);
Abstract
One embodiment is directed to a plasma source comprising a body in which a cavity is formed and at least two self-contained magnetron assemblies disposed within the cavity. The magnetron assemblies are mutually electrically isolated from each other and from the body. In one implementation of such an embodiment, the self-contained magnetron assemblies comprise closed-drift magnetron assemblies. Other embodiments are disclosed.