The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2016
Filed:
Sep. 18, 2014
Applicant:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Inventors:
Chih-Ming Chen, Hsinchu, TW;
Tsu-Hui Su, Taipei, TW;
Szu-Yu Wang, Hsinchu, TW;
Chung-Yi Yu, Hsin-Chu, TW;
Assignee:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/788 (2006.01); H01L 29/792 (2006.01); H01L 29/423 (2006.01); H01L 29/66 (2006.01); H01L 29/40 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7883 (2013.01); H01L 29/401 (2013.01); H01L 29/42328 (2013.01); H01L 29/42332 (2013.01); H01L 29/42344 (2013.01); H01L 29/66825 (2013.01); H01L 29/66833 (2013.01); H01L 29/792 (2013.01);
Abstract
The present disclosure relates to a structure and method for forming a flash memory cell with an improved erase speed and erase current. Si dots are used for charge trapping and an ONO sandwich structure is formed over the Si dots. Erase operation includes direct tunneling as well as FN tunneling which helps increase erase speed without compensating data retention.