The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2016
Filed:
Sep. 26, 2011
Applicants:
Ralph Sowden, Minneapolis, MN (US);
Kevin Barr, Inver Grove Heights, MN (US);
Matthew Laberge, Plymouth, MN (US);
Troy Palm, Eden Prairie, MN (US);
Dennis Benson, Burnsville, MN (US);
Inventors:
Ralph Sowden, Minneapolis, MN (US);
Kevin Barr, Inver Grove Heights, MN (US);
Matthew Laberge, Plymouth, MN (US);
Troy Palm, Eden Prairie, MN (US);
Dennis Benson, Burnsville, MN (US);
Assignee:
Rudolph Technologies, Inc., Wilmington, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6838 (2013.01); H01L 21/67253 (2013.01); H01L 21/67259 (2013.01); H01L 21/68 (2013.01); H01L 21/68785 (2013.01);
Abstract
A moveable semiconductor substrate support includes a control device receiving data from one or more sensors and providing control signals to one or more actuators. The control device is coupled to and moves with the moveable substrate support to facilitate flexible and complex operation of the substrate support itself.