The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2016
Filed:
Feb. 19, 2015
Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;
Yasushi Ebizuka, Tokyo, JP;
Seiichiro Kanno, Tokyo, JP;
Masaya Yasukochi, Tokyo, JP;
Masakazu Takahashi, Tokyo, JP;
Naoya Ishigaki, Tokyo, JP;
Go Miya, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
Proposed are an electrostatic chuck mechanism and a charged particle beam apparatus including a first plane that is a plane of a side in which a sample is adsorbed, a first electrode to which a voltage for generating an adsorptive power between the first plane and the sample is applied, and a second electrode that is arranged in a position relatively separated from the sample toward the first plane and through which a virtual line that is perpendicular to the first plane and contacts an edge of the sample passes, wherein the first plane is formed so that a size in a plane direction of the first plane is smaller than that of the sample.