The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2016
Filed:
Mar. 15, 2013
Applicant:
Sunedison Semiconductor Limited (Uen201334164h), Singapore, SG;
Inventors:
John Allen Pitney, St. Peters, MO (US);
Manabu Hamano, Utsunomiya, JP;
Assignee:
SunEdison Semiconductor Limited (UEN201334164H), Singapore, SG;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/12 (2006.01); H01L 21/02 (2006.01); C30B 25/10 (2006.01); C30B 25/16 (2006.01); C23C 16/458 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02104 (2013.01); C23C 16/4584 (2013.01); C30B 25/10 (2013.01); C30B 25/12 (2013.01); C30B 25/16 (2013.01); H01L 21/68785 (2013.01);
Abstract
Apparatus and methods for wafer processes such as etching and chemical vapor deposition processes are disclosed. In some embodiments, the apparatus includes a susceptor and a ring disposed beneath the susceptor to influence a thickness of the deposited epitaxial layer.