The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 26, 2016

Filed:

Jan. 31, 2013
Applicant:

Applied Materials Israel Ltd., Rehovot, IL;

Inventors:

Mark Geshel, Kfar-Saba, IL;

Zvi Goren, Nes-Ziona, IL;

Efrat Rozenman, Aseret, IL;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); G06F 19/00 (2011.01); G06T 7/00 (2006.01); G01R 31/26 (2014.01); G01R 31/28 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G06T 7/0004 (2013.01); G01R 31/26 (2013.01); G01R 31/2894 (2013.01); G06T 7/001 (2013.01); G06T 7/0006 (2013.01); G06T 2207/30148 (2013.01); H01L 22/12 (2013.01);
Abstract

There is provided an inspection method capable of classifying defects detected on a production layer of a specimen. The method comprises: obtaining input data related to the detected defects; processing the input data using a decision algorithm associated with the production layer and specifying two or more classification operations and a sequence thereof; and sorting the processed defects in accordance with predefined bins, wherein each bin is associated with at least one classification operation, wherein at least one classification operation sorts at least part of the processed defects to one or more classification bins to yield finally classified defects, and wherein each classification operation, excluding the last one, sorts at least part of the processed defects to be processed by one or more of the following classification operations.


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