The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2016
Filed:
Dec. 27, 2011
Bart Scholte Von Mast, Azmoos, CH;
Wolfgang Rietzler, Bludenz, AT;
Rogier Lodder, Bad Ragaz, CH;
Rolf Bazlen, Rorschach, CH;
Daniel Rohrer, Mels, CH;
Bart Scholte Von Mast, Azmoos, CH;
Wolfgang Rietzler, Bludenz, AT;
Rogier Lodder, Bad Ragaz, CH;
Rolf Bazlen, Rorschach, CH;
Daniel Rohrer, Mels, CH;
EVATEC AG, Trübbach, CH;
Abstract
To reduce pumping time of a vacuum treatment chamber served by a transport arrangement in a transport chamber the vacuum treatment chamber is split into a workpiece treatment compartment and a pumping compartment in mutual free flow communication and arranged opposite each other with respect to a movement path of the transport arrangement serving the vacuum treatment chamber. The pumping compartment allows a pumping port to have a flow cross-section area that is freely selectable independently from the geometry of the treatment compartment.