The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2016
Filed:
Sep. 09, 2013
Hitachi Kokusai Electric Inc., Tokyo, JP;
L'air Liquide-societe Anonyme Pour L'etude ET L'exploitation Des Procedes Georges Claude, Paris, FR;
Yoshiro Hirose, Toyama, JP;
Norikazu Mizuno, Toyama, JP;
Kazutaka Yanagita, Tsukuba, JP;
Katsuko Higashino, Newark, DE (US);
Abstract
Provided are: forming a thin film made of a specific element alone on a substrate by performing a specific number of times a cycle of: supplying a first source to the substrate, the first source containing the specific element and a halogen-group; and supplying a second source to the substrate, the second source containing the specific element and an amino-group, and having amino-group-containing ligands whose number is two or less in its composition formula and not more than the number of halogen-group-containing ligands in the composition formula of the first source.