The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2016
Filed:
Jun. 18, 2014
Applicant:
Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;
Inventors:
Yong Son, Suwon-si, KR;
Min Kang, Seoul, KR;
Bong-Yeon Kim, Seoul, KR;
Dong-Eon Lee, Seoul, KR;
Jun-Hyuk Woo, Yongin-si, KR;
Hyun-Joo Lee, Seoul, KR;
Sang-Uk Lim, Yongin-si, KR;
Jin-Ho Ju, Seoul, KR;
Assignee:
SAMSUNG DISPLAY CO., LTD., , KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/26 (2012.01); G03F 7/40 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 1/26 (2013.01); G03F 7/20 (2013.01); G03F 7/40 (2013.01);
Abstract
A phase shift device includes a phase shift mask which includes a transparent substrate, and a phase shift pattern which is provided on the transparent substrate, and includes a first area having a first thickness, a second area having a second thickness which is less than the first thickness, a first opening having a first opening width and defined at the first area, and a second opening having a second opening width and defined at the second area.