The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2016
Filed:
Jul. 29, 2013
Cascade Microtech, Inc., Beaverton, OR (US);
Joerg Kiesewetter, Thiendorf OT Sacka, DE;
Stojan Kanev, Thiendorf OT Sacka, DE;
Michael Teich, Friedewald, DE;
Karsten Stoll, Sohland an der Spree, DE;
Axel Schmidt, Thiendorf OT Stoelpchen, DE;
CASCADE MICROTECH, INC., Beaverton, OR (US);
Abstract
In a method and a device for testing a test substrate under defined thermal conditions, a substrate that is to be tested is held by a temperature-controllable chuck and is set to a defined temperature; the test substrate is positioned relative to test probes by at least one positioning device; and the test probes make contact with the test substrate for testing purposes. At least one component of the positioning device that is present in the vicinity of the temperature-controlled test substrate is set to a temperature that is independent of the temperature of the test substrate by a temperature-controlling device, and this temperature is held constant.