The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2016
Filed:
Jul. 15, 2015
Applicant:
Fujifilm Manufacturing Europe Bv, Tilburg, NL;
Inventors:
Serguei Starostine, Tilburg, NL;
Hindrik De Vries, Tilburg, NL;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/3105 (2006.01); H01L 21/02 (2006.01); H01L 51/00 (2006.01); C23C 16/40 (2006.01); C23C 16/56 (2006.01); H01J 37/32 (2006.01); H01L 29/40 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02247 (2013.01); C23C 16/401 (2013.01); C23C 16/56 (2013.01); H01J 37/32018 (2013.01); H01L 29/408 (2013.01); H01L 51/0097 (2013.01); H01L 21/02203 (2013.01); H01L 21/02332 (2013.01); H01L 21/02362 (2013.01); Y10T 428/249969 (2015.04);
Abstract
The invention provides a method for manufacturing a barrier layer on a substrate, the method comprising: The invention further provides a device for manufacturing a barrier layer on a substrate.