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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9387552 B1

PDFFull Text
Date of Patent:
Jul. 12, 2016

Filed:

Apr. 27, 2015

Laser annealing apparatus and laser annealing method using the same

Applicant:

Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;

Inventors:

Joo Woan Cho, Seongnam-si, KR;

Sanghoon Ahn, Seoul, KR;

Byoungho Cheong, Yongin-si, KR;

Byoung Kwon Choo, Hwaseong-si, KR;

Assignee:

Samsung Display Co., Ltd., Yongin, KR;

Attorney:

Knobbe Martens Olson & Bear LLP

Primary Examiner:

Jaehwan Oh

Int. Cl.
CPC ...
H01L 21/02 (2006.01); G02B 27/14 (2006.01); G02B 26/08 (2006.01); B23K 26/06 (2014.01); B23K 26/067 (2006.01); C21D 9/50 (2006.01); H01L 21/268 (2006.01);
U.S. Cl.
CPC ...
B23K 26/062 (2015.10); B23K 26/0604 (2013.01); B23K 26/0643 (2013.01); B23K 26/0665 (2013.01); B23K 26/0676 (2013.01); B23K 26/082 (2015.10); B23K 26/352 (2015.10); C21D 9/50 (2013.01); G02B 26/08 (2013.01); G02B 27/145 (2013.01); H01L 21/268 (2013.01); B23K 2201/40 (2013.01);
Abstract

A laser annealing apparatus includes a beam splitter that splits a laser beam emitted from a laser source into a reflection light beam and a transmission light beam, a beam vibrator that makes an irradiation point of the reflection light beam or the transmission light beam vibrate in a predetermined direction, a beam inverter that inverts the reflection light beam or the transmission light beam, and a light collector that collects the reflection light and the transmission light.

Find Patent Forward Citations

Cho, Joo. (2016). Laser annealing apparatus and laser annealing method using the same (U.S. Patent No. 9387552). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9387552

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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