The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2016
Filed:
Feb. 04, 2009
Daniel O. Clark, Pleasanton, CA (US);
Mehran Moalem, Cupertino, CA (US);
Robbert M. Vermeulen, Pleasant Hill, CA (US);
Phil Chandler, San Francisco, CA (US);
Daniel O. Clark, Pleasanton, CA (US);
Mehran Moalem, Cupertino, CA (US);
Robbert M. Vermeulen, Pleasant Hill, CA (US);
Phil Chandler, San Francisco, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A system for treating flammable effluent gas is provided. The system includes an exhaust conduit to carry the flammable effluent gas to an abatement unit, a control system coupled to the abatement unit to determine an operating parameter of the abatement unit, a bypass valve coupled to the exhaust conduit which is an operative responsive to the monitoring system, and a source of second gas to be mixed with the effluent gas diverted from the abatement unit when the bypass valve is operating in a bypass mode to provide a mixed gas having a flammability lower than the effluent gas. Methods of the invention as well as numerous other aspects are provided.