The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2016
Filed:
Oct. 22, 2015
Applicant:
United Microelectronics Corp., Hsin-Chu, TW;
Inventors:
Chia-Fu Hsu, Tainan, TW;
Chun-Mao Chiou, Chiayi County, TW;
Shih-Chieh Hsu, New Taipei, TW;
Jian-Cun Ke, Tainan, TW;
Chun-Lung Chen, Tainan, TW;
Lung-En Kuo, Tainan, TW;
Assignee:
UNITED MICROELECTRONICS CORP., Science-Based Industrial Park, Hsin-Chu, TW;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/76 (2006.01); H01L 29/49 (2006.01); H01L 29/51 (2006.01); H01L 21/28 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/495 (2013.01); H01L 21/28088 (2013.01); H01L 29/4983 (2013.01); H01L 29/513 (2013.01); H01L 29/517 (2013.01); H01L 29/6656 (2013.01); H01L 29/78 (2013.01); H01L 29/66545 (2013.01);
Abstract
A semiconductor device is disclosed. The semiconductor device includes a substrate, a gate structure on the substrate, and a spacer adjacent to the gate structure, in which the bottom of the spacer includes a tapered profile and the tapered profile comprises a convex curve.