The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2016
Filed:
Oct. 21, 2013
Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;
Muneyuki Fukuda, Tokyo, JP;
Naomasa Suzuki, Tokyo, JP;
Akira Ikegami, Tokyo, JP;
Hideto Dohi, Tokyo, JP;
Momoyo Enyama, Tokyo, JP;
Tomoyasu Shojo, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
In order to provide a charged particle beam apparatus capable of high resolution measurement of a sample at any inclination angle, a charged particle beam apparatus for detecting secondary charged particles () generated by irradiating a sample () with a primary charged particle beam () is provided with a beam tilt lens () having: a yoke magnetic path member () and a lens coil () to focus the primary charged particle beam () on the sample (); and a solenoid coil () configured to arrange the upper end on the side surface of the yoke magnetic path member () and arrange the bottom end between the tip end of the pole piece of the yoke magnetic path member () and the sample () in order to arbitrarily tilt the primary charged particle beam () on the sample ().