The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 05, 2016

Filed:

Jan. 21, 2015
Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Kazuya Yano, Nirasaki, JP;

Shuji Akiyama, Nirasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/20 (2006.01); G01R 1/073 (2006.01); B24B 19/16 (2006.01); G01R 3/00 (2006.01);
U.S. Cl.
CPC ...
G01R 1/07342 (2013.01); B24B 19/16 (2013.01); G01R 1/073 (2013.01); G01R 3/00 (2013.01);
Abstract

A proberincluding a probe cardhaving multiple probe needlesincludes a needle-tip polishing unit, and the needle-tip polishing unitincludes a WAPPto be contacted with needle tips and a supporting memberconfigured to support the WAPP. On a top surface of the WAPP, a wrapping sheetis provided, and the WAPPincludes multiple recessesformed on a bottom surfacethereof and the supporting memberincludes multiple protrusionsformed on a ceiling surfacethereof. When the WAPPis moved to a retreat position, the protrusionsare respectively inserted and fitted into the recesses, and when the WAPPis moved to a contact position, top portions of the protrusionsare respectively brought into contact with portions on the bottom surfacewhere the recessesare not formed.


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