The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 05, 2016

Filed:

Jun. 22, 2011
Applicants:

Mark Anthony Meloni, The Colony, TX (US);

John Douglas Corless, Dallas, TX (US);

Andrew Weeks Kueny, Dallas, TX (US);

Mike Whelan, Coppell, TX (US);

Inventors:

Mark Anthony Meloni, The Colony, TX (US);

John Douglas Corless, Dallas, TX (US);

Andrew Weeks Kueny, Dallas, TX (US);

Mike Whelan, Coppell, TX (US);

Assignee:

Verity Instruments, Inc., Carrollton, TX (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/64 (2006.01); G01N 21/896 (2006.01);
U.S. Cl.
CPC ...
G01N 21/896 (2013.01);
Abstract

A workpiece characterization system for obtaining simultaneous measurement of layer and photoluminescence properties of a workpiece. The workpiece characterization system includes an excitation light and an illumination light each impinging upon a surface of a workpiece whereby the workpiece emits photoluminescent light and encodes light from said illumination source with layer information. The excitation light and the illumination light are generated from a single light source. The light from the single light source is filtered to remove wavelengths of light that correlate to light wavelengths emitted from the workpiece as a result of excitation. Wavelengths that correlate to light reflected from the workpiece that may contain encoded information are not filtered.


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