The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2016
Filed:
Dec. 26, 2014
Kla-tencor Corporation, Milpitas, CA (US);
Daniel Men, Haifa, IL;
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A flexible coupling including two body members each having an internal flexible member to cooperate with a rotational shaft and an external connecting member interconnecting two body members with each other. In order to minimize the axial length of the coupling maintaining its high torsional rigidity but enabling for compensation of substantial shafts misalignments such as parallel, angular or skewed axial misalignment, the internal flexible member passes over the coupling axis forming cavities between the flexible member and internal walls of the external connecting member in a plane perpendicular to the coupling axis and is provided with at least one flexible section between the connecting member and the coupling axis, the flexible section being substantially parallel to the coupling axis.