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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9376594 B1

PDFFull Text
Date of Patent:
Jun. 28, 2016

Filed:

Mar. 11, 2013

Polishing composition

Applicant:

Fujimi Incorporated, Kiyosu-shi, Aichi, JP;

Inventors:

Shuichi Tamada, Kiyosu, JP;

Satoru Yarita, Kiyosu, JP;

Assignee:

FUJIMI INCORPORATED, Kiyosu-Shi, JP;

Attorney:

Foley & Lardner LLP

Primary Examiner:

Lan Vinh

Int. Cl.
CPC ...
H01L 21/302 (2006.01); C09G 1/02 (2006.01); H01L 21/321 (2006.01); H01L 21/306 (2006.01); H01L 21/02 (2006.01); C09K 3/14 (2006.01); C23F 1/30 (2006.01); C23F 1/40 (2006.01); C23F 3/02 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); C09K 3/1409 (2013.01); C09K 3/1436 (2013.01); C09K 3/1463 (2013.01); C23F 1/30 (2013.01); C23F 1/40 (2013.01); C23F 3/02 (2013.01); H01L 21/02024 (2013.01); H01L 21/30625 (2013.01); H01L 21/3212 (2013.01);
Abstract

There is provided a polishing composition capable of suppressing formation of a stepped portion caused by etching of a surface of a polishing object including a portion containing a group IV material when the polishing object is polished. The present invention relates to a polishing composition for polishing of a polishing object including a portion that contains a group IV material, and the polishing composition contains an oxidizing agent and an anticorrosive agent. Preferably, the anticorrosive agent includes at least one selected from the group consisting of compounds in which two or more carbonyl groups contained in a molecule are bonded through a carbon atom in the molecule. To be more specific, preferably, the anticorrosive agent includes at least one selected from the group consisting of a 1,3-diketone compound, a 1,4-diketone compound, and a triketone compound.

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