The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2016
Filed:
Nov. 04, 2014
Applicant:
Fns Tech Co., Ltd., Chung-Nam, KR;
Inventors:
Oscar K. Hsu, Chelmsford, MA (US);
Marc C. Jin, Boston, MA (US);
David Adam Wells, Hudson, NH (US);
John Erik Aldeborgh, Boxford, MA (US);
Assignee:
FNS TECH CO., LTD., Cheonan-Si, KR;
Primary Examiner:
Int. Cl.
CPC ...
B24B 1/00 (2006.01); B24B 37/26 (2012.01); B24B 37/24 (2012.01);
U.S. Cl.
CPC ...
B24B 37/24 (2013.01); B24B 37/26 (2013.01);
Abstract
A polishing pad is provided herein, which may include a plurality of soluble fibers having a diameter in the range of about 5 to 80 micrometers, and an insoluble component. The pad may also pad include a first surface having a plurality of micro-grooves, wherein the soluble fibers form the micro-grooves in the pad. The micro-grooves may have a width and/or depth up to about 150 micrometers. In addition, a method of forming the polishing pad and a method of polishing a surface with the polishing pad is disclosed.