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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9373926 B1

PDFFull Text
Date of Patent:
Jun. 21, 2016

Filed:

Apr. 23, 2015

Laser chamber and discharge excitation gas laser apparatus

Applicant:

Gigaphoton Inc., Oyama-shi, Tochigi, JP;

Inventors:

Hiroaki Tsushima, Oyama, JP;

Hakaru Mizoguchi, Oyama, JP;

Junichi Fujimoto, Oyama, JP;

Hiroaki Nakarai, Oyami, JP;

Natsushi Suzuki, Oyami, JP;

Assignee:

GIGAPHOTON INC., Tochigi, JP;

Attorney:

Studebaker & Brackett PC

Primary Examiner:

Dung Nguyen

Int. Cl.
CPC ...
H01S 3/036 (2006.01); F16C 33/66 (2006.01); F16C 32/04 (2006.01); H01S 3/134 (2006.01); H01S 3/225 (2006.01); H01S 3/038 (2006.01); H01S 3/097 (2006.01); H01S 3/223 (2006.01); H01S 3/104 (2006.01); F16C 19/06 (2006.01); H01S 3/0971 (2006.01); H01S 3/1055 (2006.01);
U.S. Cl.
CPC ...
H01S 3/036 (2013.01); F16C 32/0402 (2013.01); F16C 32/0406 (2013.01); F16C 33/6696 (2013.01); H01S 3/038 (2013.01); H01S 3/097 (2013.01); H01S 3/104 (2013.01); H01S 3/134 (2013.01); H01S 3/2232 (2013.01); H01S 3/2251 (2013.01); H01S 3/2256 (2013.01); F16C 19/06 (2013.01); F16C 2204/02 (2013.01); F16C 2204/10 (2013.01); F16C 2204/52 (2013.01); H01S 3/0971 (2013.01); H01S 3/1055 (2013.01); H01S 3/225 (2013.01);
Abstract

There is provided a laser chamber housing a pair of discharge electrodes and a gas circulation fun, the laser chamber including: a magnetic bearing configured to support a shaft of the gas circulation fan, with the shaft being in non-contact with the magnetic bearing; and a touchdown bearing configured to operate as a bearing when the magnetic bearing is uncontrollable, the touchdown bearing being provided with solid lubricant configured of one or more of an Au plating layer, a Ni-containing plating layer, and a Cu plating layer.

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