The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2016
Filed:
Jan. 17, 2012
Applicants:
Toshinobu Furusho, Koshi, JP;
Takahiro Ookubo, Koshi, JP;
Takashi Sasa, Koshi, JP;
Tsuyoshi Nogami, Koshi, JP;
Inventors:
Toshinobu Furusho, Koshi, JP;
Takahiro Ookubo, Koshi, JP;
Takashi Sasa, Koshi, JP;
Tsuyoshi Nogami, Koshi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01D 57/00 (2006.01); G03F 7/16 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G03F 7/162 (2013.01); H01L 21/6715 (2013.01); H01L 21/67017 (2013.01);
Abstract
The pressure sensor detects a pressure in the operation chamber when the first opening/closing valve is opened at a time of starting a replenishment of the chemical liquid into the chemical liquid pump. The flow rate sensor detects an exhaust flow rate exhausted from the operation chamber.