The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2016
Filed:
Aug. 15, 2012
Satohiko Hoshino, Nirasaki, JP;
Satohiko Hoshino, Nirasaki, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
An imprinting method is capable of separating a molding material and a target material rapidly in pattern formation. The imprinting method includes a transferring process for transferring an inverted pattern of a moldhaving a desired pattern formed thereon to a resistby pressing the moldagainst the resist; a curing process for curing the resistby heating or irradiating light; and a separating process for separating the moldfrom the resistafter the resistis cured through the transferring process. The separating process includes a pulling process for pulling the moldaway from the resistin a direction opposite to a direction in which the resistis pressed; and a pushing process for pushing the resistin the same direction as a direction in which the moldpresses the resist