The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 21, 2016

Filed:

Feb. 04, 2014
Applicant:

Asm Ip Holding B.v., Almere, NL;

Inventors:

Naoto Tsuji, Tokyo, JP;

Takayuki Yamagishi, Kashiwazaki, JP;

Assignee:

ASM IP Holding B.V., Almere, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 15/00 (2006.01); H01L 21/677 (2006.01); B23Q 7/00 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
B25J 15/0014 (2013.01); H01L 21/67742 (2013.01); H01L 21/68707 (2013.01); Y10T 29/49998 (2015.01);
Abstract

An anti-slip end-effector for transporting a workpiece, which is configured to be attached to a robotic arm, includes: a workpiece-supporting area for placing a workpiece thereon for transportation; at least one front protrusion disposed at a distal end of the workpiece-supporting area for engaging an edge of the workpiece to restrict movement of the workpiece placed on the workpiece-supporting area beyond the front protrusion; and at least one anti-slip protrusion disposed in the workpiece-supporting area for contacting and supporting the backside of the workpiece, said anti-slip protrusion having a top face having a static friction coefficient of 1.0 or more as measured against the backside of the workpiece, and having a surface roughness of less than 0.4 μm.

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