The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2016
Filed:
Nov. 13, 2014
Applicant:
Sandia Corporation, Albuquerque, NM (US);
Inventors:
Jonathan J. Wierer, Jr., Albuquerque, NM (US);
Andrew A. Allerman, Tijeras, NM (US);
Assignee:
Sandia Corporation, Albuquerque, NM (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/04 (2006.01); H01L 33/06 (2010.01); H01L 31/18 (2006.01); H01S 5/343 (2006.01); H01L 33/00 (2010.01); H01L 31/0352 (2006.01); H01L 21/02 (2006.01); H01L 21/44 (2006.01); H01L 21/324 (2006.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
H01L 33/06 (2013.01); H01L 21/0242 (2013.01); H01L 21/0254 (2013.01); H01L 21/0262 (2013.01); H01L 21/02433 (2013.01); H01L 21/02458 (2013.01); H01L 21/02507 (2013.01); H01L 21/02576 (2013.01); H01L 21/02579 (2013.01); H01L 21/02664 (2013.01); H01L 21/324 (2013.01); H01L 21/44 (2013.01); H01L 31/035236 (2013.01); H01L 31/1856 (2013.01); H01L 33/0066 (2013.01); H01L 33/0075 (2013.01); H01S 5/34333 (2013.01); B82Y 40/00 (2013.01); Y10S 977/89 (2013.01);
Abstract
Selective layer disordering in a doped III-nitride superlattice can be achieved by depositing a dielectric capping layer on a portion of the surface of the superlattice and annealing the superlattice to induce disorder of the layer interfaces under the uncapped portion and suppress disorder of the interfaces under the capped portion. The method can be used to create devices, such as optical waveguides, light-emitting diodes, photodetectors, solar cells, modulators, laser, and amplifiers.