The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 14, 2016

Filed:

Jun. 25, 2015
Applicant:

Industrial Technology Research Institute, Hsinchu, TW;

Inventors:

Shang-Chun Chen, Hsinchu County, TW;

Cha-Hsin Lin, Miaoli County, TW;

Tzu-Kun Ku, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 23/00 (2006.01); H01L 21/768 (2006.01); H01L 21/02 (2006.01); H01L 21/56 (2006.01); H01L 21/683 (2006.01); H01L 21/78 (2006.01); H01L 25/00 (2006.01); H01L 25/065 (2006.01); H01L 23/14 (2006.01); H01L 23/498 (2006.01); H01L 21/48 (2006.01); H01L 23/538 (2006.01);
U.S. Cl.
CPC ...
H01L 24/97 (2013.01); H01L 21/02304 (2013.01); H01L 21/4857 (2013.01); H01L 21/566 (2013.01); H01L 21/6835 (2013.01); H01L 21/76877 (2013.01); H01L 21/78 (2013.01); H01L 23/145 (2013.01); H01L 23/49827 (2013.01); H01L 24/11 (2013.01); H01L 24/14 (2013.01); H01L 24/81 (2013.01); H01L 25/0657 (2013.01); H01L 25/50 (2013.01); H01L 21/486 (2013.01); H01L 21/4853 (2013.01); H01L 23/5389 (2013.01); H01L 2221/68359 (2013.01); H01L 2224/16235 (2013.01); H01L 2224/81192 (2013.01); H01L 2225/06517 (2013.01); H01L 2225/06548 (2013.01); H01L 2225/06572 (2013.01); H01L 2924/181 (2013.01);
Abstract

A manufacturing method of a semiconductor device is provided. First, a mould is provided. The mould has a chamber, patterns in the chamber, and protrusions in the chamber. A carrier substrate having at least one die located thereon is disposed in the chamber, and the protrusions surround the die. A thermosetting material is injected into the chamber and is cured. The cured thermosetting material is separated from the mould, so as to form an interposer substrate. A plurality of through holes corresponding to the protrusions and a plurality of grooves corresponding to the patterns are formed on the interposer substrate. A conductive material is filled into the through holes and the grooves to form a plurality of conductive pillars and a first conductive pattern layer on a first surface of the interposer substrate. The first conductive pattern layer is electrically connected with the conductive pillars.


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