The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2016
Filed:
Jan. 21, 2015
Hitachi High-tech Science Corporation, Minato-ku, Tokyo, JP;
Abstract
A cross-section processing observation apparatus includes an ion beam control unit which controls a charged particle beam generation-focusing portion and a deflector, and a DAC which converts an input digital signal into an analog signal which is to be input to the deflector. A field-of-view setting portion sets a value of a field of view of a charged particle beam where the scanning performed by the deflector is performed on the basis of a set value of a slice amount, and the field-of-view setting portion is configured to set a value of one-nth of the slice amount, where n is a first natural number, as an input digital value '1' of the digital/analog converter and to set a value obtained by multiplying said value set as the input digital value '1' by a second natural number as a value of the field of view.