The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 14, 2016

Filed:

Dec. 22, 2014
Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

Steven Randolph, Portland, OR (US);

James Miyasaki, Aloha, OR (US);

Marcus Straw, Portland, OR (US);

Assignee:

FEI Company, Hillsboro, OR (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); G01N 21/64 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); G01N 21/6428 (2013.01); G01N 21/6486 (2013.01); H01J 37/26 (2013.01); G01N 2021/6439 (2013.01); H01J 2237/26 (2013.01);
Abstract

A method is provided for preparing a sample for correlative optical and electron imaging and correcting aberrations in the imaging process due to sample deformation. Dye-coated fiducial markers are distributed throughout the sample volume. The fiducial markers are preferably in the form of polystyrene nanospheres that are functionalized on their surface and subsequently treated with a fluorescent dye. The dye does not penetrate the sphere but only binds to the surface. By limiting the dye to the surface of the nanospheres, the shape of the spheres can be determined in iPALM and in charged particle images aiding in tracking of physical changes that may occur to the sample volume.


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