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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9366973 B1

PDFFull Text
Date of Patent:
Jun. 14, 2016

Filed:

Dec. 20, 2011

Lithographic apparatus and device manufacturing method

Applicants:

David Christopher Ockwell, Waalre, NL;

Noud Jan Gilissen, 's-Gravenzande, NL;

Inventors:

David Christopher Ockwell, Waalre, NL;

Noud Jan Gilissen, 's-Gravenzande, NL;

Assignee:

ASML Netherlands B.V., Veldhoven, NL;

Attorney:

Sterne, Kessler, Goldstein & Fox P.L.L.C.

Primary Examiner:

Steven H Whitesell Gordon

Int. Cl.
CPC ...
G03F 7/20 (2006.01); H01H 13/83 (2006.01); H01H 13/704 (2006.01); H01H 13/7065 (2006.01); H01H 3/12 (2006.01); H01H 13/86 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70708 (2013.01); G03F 7/70733 (2013.01); H01H 13/704 (2013.01); H01H 13/7065 (2013.01); H01H 13/83 (2013.01); H01H 3/125 (2013.01); H01H 13/86 (2013.01); H01H 2219/036 (2013.01); H01H 2219/064 (2013.01); H01H 2221/03 (2013.01); H01H 2223/036 (2013.01); H01H 2227/028 (2013.01); Y10T 29/49826 (2015.01);
Abstract

A substrate support is provided for a lithographic apparatus. The support comprises a substrate table constructed to hold a substrate and a chuck for the substrate table. In operation, the substrate table is supported by the chuck and clamped thereto. The substrate support comprises a first set of burls on a surface of the support block for abutting against the substrate table during the clamping and a second set of burls on a surface of the substrate table for abutting against the support block during the clamping.

Find Patent Forward Citations

Ockwell, David. (2016). Lithographic apparatus and device manufacturing method (U.S. Patent No. 9366973). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9366973

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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